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♦ Hellma Materials GmbH & Co.KG

Hellma graup had purchased all Assets of the CaF2 business from Shott Lithotec on April 7, 2010.
New company name gHellma materials g stay Jena Germany has over 80 years of experience in CaF2 crystal growing at Carl Zeiss Jena and Schott and providing optics material for required for illumination and projection 248 and 193 nm micro-lithography.

♦ Feature of Hellma Materials@CaF₂

Calcium fluoride single crystals, grown from high purity raw materials, are required for illumination and projection optics in 248 and 193 nm micro-lithography technologies

Feature
- Excellent UV transmittance (150nm - 8µm)

- High laser durability

- Low stress birefringence

- High refractive index homogeneity

The very high laser durability of CaF2 makes it the first choice material for litho excimer laser optics, beam deliveries, and for all excimer wavelengths in a wide range of other applications.
Synthetic calcium fluoride crystals complete the application range of optical materials from VUV to IR with a very good transmission ranging from 130 nm to 9µm.
Advantages in optical performance can be achieved with calcium fluoride in chromatically corrected optical systems in astronomy, photography, HDTV zoom lenses, as well as in microscopy.
Further applications are sensors (especially in IR spectrum), spectrometers and medical lasers.

Hellma Materials offers CaF2 components and blanks with different crystal orientations (<111>, <100>, <110> random or others on request) along with different surface qualities (raw, cut, ground or polished), depending on the individual requirements.

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♦ IC Litho: Excimer Laser optics and beam delively grade CaF₂

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Typical dimensions	disks: up to 100 mm diameter / 30 mm thickness prisms: up to 100 mm edge length
Wavelength	248nm	193nm		157nm
Internal transmittance per 10 mm sample thickness	> 99.8 %	> 99.7 %		> 99.4 %
Refractive index homogeneityPV @ 633 nm	1-15 ppm (depending on diameter)
Stress birefringence 1 - 20 PV @ 633 nm^*	1-20 nm/cm²
Bubbles, inclusions (ISO 10110-3)	1/1 x 0.063 (typical)
Laser durability classification	Hellma Materials offers material with a laser durability up to highest requirements which is categorized by an internal classification method. In addition to volume characteristics, laser durability is also dependent on surface quality (with increasing laser energies) and on the laser operating conditions.
Laser durability classification	LD-A: Superior LD-C: Advanced		LD-B: High LD-D: Standard
A qualified long-term laser durability is provided by each of these classes adapted to the individual application requirements. Please define application wavelength, energy density, repetition rate, pulse length and pulse number.
Laser damage threshold	~7 J/cm2 (effects: surface defects, ablation)

* For single crystalline material; smallest value referring to <111> orientation. Polycrystalline material is also available.

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♦ IC Litho: Manufacturing grade CaF₂

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Typical dimensions	up to 350 mm diameter, 80 mm thickness
Wavelength	248nm	193nm	157nm
Internal transmittance per 10 mm sample thickness	> 99.8 %	> 99.7 %	> 99.4 %
Refractive index homogeneityPV @ 633 nm	1-15 ppm (depending on diameter)
Stress birefringence 1 - 20 PV @ 633 nm^*	0.5-20 nm/cm²
Bubbles, inclusions (ISO 10110-3)	1/1 x 0.063 (typical)

* For single crystalline material; smallest value referring to <111> orientation. Polycrystalline material is also available.

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♦ Non-ILitho: CaF₂

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Dimensions	up to 350 mm diameter, 80 mm thickness
Wavelength	UV grade: 193nm - 400nm VIS grade: 400nm - 780nm IR grade: 0.78 - 8.00µm
Internal transmittance per 10 mm sample thickness	> 99.0 %
Refractive index homogeneityPV @ 633 nm	3 -20 ppm
Stress birefringence 1 - 20 PV @ 633 nm^*	1 - 50 nm/cm²
Bubbles, inclusions (ISO 10110-3)	1/1x0.10 (Typical)

* For single crystalline material; smallest value referring to <111> orientation. Polycrystalline material is also available.

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